Nonlinear Behavior of Electrostatically Actuated Microbeams with Coupled Longitudinal–Transversal Vibration
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DOI: 10.3390/mi10050315
Abstract: Microelectromechanical switch has become an essential component in a wide variety of applications, ranging from biomechanics and aerospace engineering to consumer electronics. Electrostatically actuated microbeams and microplates are chief parts of many MEMS instruments. In… read more here.
Keywords: actuated microbeams; vibration; coupled longitudinal; transversal ... See more keywords