Sliding Mode Tracking Control With Perturbation Estimation for Hysteresis Nonlinearity of Piezo-Actuated Stages
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DOI: 10.1109/access.2018.2840538
Abstract: Piezo-actuated stages are widely applied in the field of high-precision positioning. However, piezo-actuated stages produce hysteresis between the input voltage and the output displacement that negatively influences the positioning accuracy. In this paper, the Bouc–Wen… read more here.
Keywords: sliding mode; control; hysteresis; actuated stages ... See more keywords