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Published in 2020 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2020.111236
Abstract: Abstract In this paper we present and compare three different magnet configurations for Lorentz actuation of a μ-Coriolis mass flow sensor. The first configuration consists of 2 cylindrical magnets, the second is based on a…
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Keywords:
actuation coriolis;
coriolis mass;
configuration;
field ... See more keywords