Resolution adjustable Lissajous scanning with piezoelectric MEMS mirrors.
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DOI: 10.1364/oe.476198
Abstract: We previously designed a dual-axis piezoelectric MEMS mirror with a low crosstalk gimbal structure, which is utilized as the key device for further research for laser beam scanning. This paper mainly focuses on studying the… read more here.
Keywords: mems mirror; resolution; piezoelectric mems; adjustable lissajous ... See more keywords