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Published in 2018 at "IEEE Journal of the Electron Devices Society"
DOI: 10.1109/jeds.2018.2809587
Abstract: In this paper, we propose the extendibility of ultra-thin body and box (UTBB) devices to 7 and 5 nm technology nodes focusing on electrostatics. A difficulty in scaling traditional UTBB is the need for SOI…
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Keywords:
fdsoi device;
advanced fdsoi;
electrostatics;
metal gate ... See more keywords