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Published in 2019 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2019.111131
Abstract: Abstract We have developed a wet chemical etch process for the controlled recess of cobalt metal based on ‘digital etching’. Digital etching is a cyclic process wherein each process cycle comprises an oxidation and oxide…
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Keywords:
controlled cobalt;
advanced interconnect;
cobalt;
recess ... See more keywords