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Advancing Correlative STEM Analysis Methods for FE-SEM

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1 Published in 2017 at "Microscopy and Microanalysis"

DOI: 10.1017/s1431927617003488

Abstract: Recent developments in SEM column design have led to the ability to produce sub-nm spot sizes even at high probe currents [1], thus pushing the imaging and analytical techniques available in the SEM to approach… read more here.

Keywords: analysis; advancing correlative; correlative stem; methods sem ... See more keywords