Calibration of high magnification in the measurement of critical dimension by AFM and SEM
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DOI: 10.1016/j.apsusc.2021.150481
Abstract: Abstract In the measurement of critical dimension (CD) by scanning electron microscopy (SEM) and atomic force microscopy (AFM), the measured linewidths of the CD patterns are different from the real values due to the edge… read more here.
Keywords: afm sem; microscopy; magnification; measurement critical ... See more keywords