Radius and roundness measurement of micro spheres based on a set of AFM surface scans
Sign Up to like & getrecommendations! Published in 2021 at "Measurement Science and Technology"
DOI: 10.1088/1361-6501/abcff4
Abstract: Micro coordinate measuring machines have been developed for the traceable characterization of small complex parts, due to the demand in research and industry. These machines require geometrically well characterized probing spheres of ever smaller radii.… read more here.
Keywords: surface scans; afm surface; measurement; micro ... See more keywords