Calorimetric investigations in a gas aggregation source
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DOI: 10.1063/1.5037413
Abstract: A gas aggregation source based on DC magnetron sputtering was investigated using a passive thermal probe and supplementary diagnostics (Langmuir probe and quartz crystal microbalance). Parameter variations of pressure, axial distance, and magnetron current have… read more here.
Keywords: microscopy; energy; gas aggregation; aggregation source ... See more keywords