Al0.68Sc0.32N/SiC-Based Metal-Ferroelectric-Semiconductor Capacitors Operating up to 1000 °C.
Sign Up to like & getrecommendations! Published in 2024 at "Nano letters"
DOI: 10.1021/acs.nanolett.4c06178
Abstract: Ferroelectric (Fe) materials-based devices show great promise for nonvolatile memory applications, yet few demonstrate reliable operation at elevated temperatures. In this work, we demonstrate Ni/Al0.68Sc0.32N/4H-SiC metal-ferroelectric-semiconductor capacitors for high-temperature nonvolatile memory applications. Our 30 nm… read more here.
Keywords: metal ferroelectric; al0 68sc0; 32n sic; 68sc0 32n ... See more keywords
Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors
Sign Up to like & getrecommendations! Published in 2022 at "Micromachines"
DOI: 10.3390/mi13040625
Abstract: Piezoelectric micromirrors with aluminum nitride (AlN) and aluminum scandium nitride (Al0.68Sc0.32N) are presented and compared regarding their static deflection. Two chip designs with 2 × 3 mm2 (Design 1) and 4 × 6 mm2 (Design… read more here.
Keywords: static high; aln; voltage; al0 68sc0 ... See more keywords