Improvement of Thermal Cycling Resistance of AlxSi1−xN Coatings on Cu Substrates by Optimizing Al/Si Ratio
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DOI: 10.3390/ma12142249
Abstract: The effect of the elemental composition of AlxSi1−xN coatings deposited on Cu substrates by magnetron sputtering on their structure, mechanical properties and thermal cycling performance is studied. The coatings with Al-Si-N solid solution, two-phase (AlxSi1−xN… read more here.
Keywords: al0 88si0; thermal cycling; cycling resistance; alxsi1 coatings ... See more keywords