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Published in 2021 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.1c02912
Abstract: Radio frequency (RF) microelectromechanical systems (MEMS) based on Al1-xScxN are replacing AlN-based devices because of their higher achievable bandwidths, suitable for the fifth-generation (5G) mobile network. However, overheating of Al1-xScxN film bulk acoustic resonators (FBARs)…
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Keywords:
conductivity aluminum;
aluminum scandium;
thermal conductivity;
conductivity ... See more keywords
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1
Published in 2021 at "Applied Physics Letters"
DOI: 10.1063/5.0053649
Abstract: Through its dependence on low symmetry crystal phases, ferroelectricity is inherently a property tied to the lower temperature ranges of the phase diagram for a given material. This paper presents conclusive evidence that in the…
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Keywords:
ferroelectric al1;
temperature;
temperature stability;
al1 xscxn ... See more keywords
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2
Published in 2023 at "Materials"
DOI: 10.3390/ma16051781
Abstract: Aluminum scandium nitride (Al1−xScxN) film has drawn considerable attention owing to its enhanced piezoelectric response for micro-electromechanical system (MEMS) applications. Understanding the fundamentals of piezoelectricity would require a precise characterization of the piezoelectric coefficient, which…
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Keywords:
al1 xscxn;
xscxn;
synchrotron xrd;
situ synchrotron ... See more keywords
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1
Published in 2022 at "Micromachines"
DOI: 10.3390/mi13081169
Abstract: Thin film through-thickness stress gradients produce out-of-plane bending in released microelectromechanical systems (MEMS) structures. We study the stress and stress gradient of Al0.68Sc0.32N thin films deposited directly on Si. We show that Al0.68Sc0.32N cantilever structures…
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Keywords:
al1 xscxn;
stress;
plane bending;
stress gradient ... See more keywords
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2
Published in 2022 at "Micromachines"
DOI: 10.3390/mi13081282
Abstract: Ferroelectric thin films of wurtzite-type aluminum scandium nitride (Al1−xScxN) are promising candidates for non-volatile memory applications and high-temperature sensors due to their outstanding functional and thermal stability exceeding most other ferroelectric thin film materials. In…
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Keywords:
xscxn thin;
al1 xscxn;
thermal expansion;
thin films ... See more keywords