Fabrication of Al2O3 nano-micro patterns by Al2O3 dispersion resin using UV imprint lithography
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DOI: 10.1016/j.tsf.2018.05.028
Abstract: Abstract Aluminum oxide (Al2O3) has excellent properties in terms of hardness, abrasion resistance, refractive index, electrical insulation and chemical stability; therefore, it has been used in various optical applications such as for resistance random access… read more here.
Keywords: al2o3 nano; dispersion resin; micro; nano micro ... See more keywords