Effect of the Al2O3 Deposition Method on Parylene C: Highlights on a Nanopillar-Shaped Surface
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DOI: 10.1021/acsomega.0c00735
Abstract: Parylene C (PC) has attracted tremendous attention throughout the past few years due to its extraordinary properties such as high mechanical strength and biocompatibility. When used as a flexible substrate and combined with high-κ dielectrics… read more here.
Keywords: al2o3 stack; al2o3; deposition; shaped surface ... See more keywords