Articles with "ald apcvd" as a keyword



Photo from archive.org

Comparison of passivation properties of plasma-assisted ALD and APCVD deposited Al2O3 with SiNx capping

Sign Up to like & get
recommendations!
Published in 2020 at "Solar Energy Materials and Solar Cells"

DOI: 10.1016/j.solmat.2020.110718

Abstract: Abstract In this paper, we report on the direct comparison of Al2O3 films deposited by plasma-assisted atomic layer deposition (ALD) and atmospheric pressure chemical vapor deposition (APCVD) techniques on the passivation properties of both bare… read more here.

Keywords: deposited al2o3; passivation; plasma assisted; ald apcvd ... See more keywords