Thermal ranges and figures of merit for gold-containing precursors for atomic layer deposition
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DOI: 10.1116/6.0000707
Abstract: This is a survey of known gold-containing chemical vapor deposition (CVD) and atomic layer deposition (ALD) precursors with a focus on collecting their volatilization and decomposition data. These data were applied to a figure of… read more here.
Keywords: atomic layer; deposition; layer deposition; gold ... See more keywords