Alloying during local droplet etching of AlGaAs surfaces with aluminium
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DOI: 10.1063/1.5053464
Abstract: Local droplet etching (LDE) drills self-assembled nanoholes into AlGaAs surfaces and represents a powerful technique for the fabrication of versatile quantum structures like quantum dots, rings, and molecules. Usually, LDE is performed at temperatures T… read more here.
Keywords: droplet; local droplet; droplet etching; alloying local ... See more keywords