Articles with "aligned gate" as a keyword



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Self-aligned gate-last process for quantum-well InAs transistor on insulator

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Published in 2018 at "Microelectronic Engineering"

DOI: 10.1016/j.mee.2018.01.030

Abstract: Abstract This paper presents a promising technology to make quantum-well InAs transistors on SiO2/Si substrate by using a self-aligned gate-last fabrication technique. The full self-aligned fabrication process is demonstrated, and the fabricated device is characterized.… read more here.

Keywords: gate last; self aligned; well inas; aligned gate ... See more keywords