A thin film thermoelectric device fabricated by a self-aligned shadow mask method
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DOI: 10.1088/1361-6439/aa64a3
Abstract: A planar thermoelectric device with 20 pairs of Sb2Te3 and Bi2Te3 thin-film legs was fabricated by using a facile self-aligned shadow mask method in combination with a thermal evaporation process. Effects of substrate temperature during… read more here.
Keywords: self aligned; thin film; film; aligned shadow ... See more keywords