Design and application of a hybrid alignment platform for a double-sided hot embossing process
Sign Up to like & getrecommendations! Published in 2019 at "Microsystem Technologies"
DOI: 10.1007/s00542-019-04563-4
Abstract: Hot embossing is a novel technique for the cost-effective production of micro-parts. Misalignment between the top and bottom surfaces of a product that has double-sided microstructures reduces its functions. Most solutions involve repairing or reproducing… read more here.
Keywords: alignment platform; hot embossing; double sided; process ... See more keywords
Passive alignment platform for electro-optic, photonic, and micro-optic systems
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DOI: 10.1364/oe.577054
Abstract: Large scale integration of chiplet based systems via passive alignment is of great interest for scalable packaging and implementation of current and future photonic and electronic systems. However, nanometer level alignment required for such photonic… read more here.
Keywords: optic systems; alignment; electro optic; alignment platform ... See more keywords