Characterization of AlN and AlScN film ICP etching for micro/nano fabrication
Sign Up to like & getrecommendations! Published in 2021 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2021.111530
Abstract: Abstract We investigate the inductively coupled plasma (ICP) etching characteristics of (0002) Aluminum Nitride (AlN) and Aluminum Scandium Nitride (Al0.94Sc0.06N) piezoelectric thin films as well as the implementation on piezoelectric lamb wave resonators. A profile… read more here.
Keywords: icp etching; aln alscn; characterization aln; alscn film ... See more keywords
AlN/AlScN composite film bulk acoustic wave filters for 5G bands
Sign Up to like & getrecommendations! Published in 2025 at "Applied Physics Letters"
DOI: 10.1063/5.0276488
Abstract: Bulk acoustic wave (BAW) resonators with tailored effective electromechanical coupling coefficients (Keff2) are essential for advanced filter design. Although film stack design is a common method for Keff2 adjustment, its effectiveness diminishes above 5 GHz, where… read more here.
Keywords: composite film; aln alscn; acoustic wave; alscn composite ... See more keywords