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Published in 2020 at "Crystal Research and Technology"
DOI: 10.1002/crat.202000118
Abstract: AlN is a kind of promising semiconductor material for high‐efficiency optoelectronic devices and high‐power high‐frequency electronic devices. In this work, high‐quality c‐plane AlN single crystal with low‐stress is grown on tungsten (W) substrate using a…
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Keywords:
aln;
stress;
aln crystals;
growth ... See more keywords