High quality AlN epilayers grown on nitrided sapphire by metal organic chemical vapor deposition
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DOI: 10.1038/srep42747
Abstract: Influence of sapphire pretreatment conditions on crystalline quality of AlN epilayers has been investigated by metal organic chemical vapor deposition (MOCVD). Compared to alumination treatment, it is found that appropriate sapphire nitridation significantly straightens the… read more here.
Keywords: aln epilayers; quality aln; metal organic; sapphire ... See more keywords