High quality AlN epilayers grown on nitrided sapphire by metal organic chemical vapor deposition
Sign Up to like & getrecommendations! Published in 2017 at "Scientific Reports"
DOI: 10.1038/srep42747
Abstract: Influence of sapphire pretreatment conditions on crystalline quality of AlN epilayers has been investigated by metal organic chemical vapor deposition (MOCVD). Compared to alumination treatment, it is found that appropriate sapphire nitridation significantly straightens the… read more here.
Keywords: aln epilayers; quality aln; metal organic; sapphire ... See more keywords
Impact of graded doping transition layer on structural properties of Zr-doped AlN epilayers
Sign Up to like & getrecommendations! Published in 2025 at "Applied Physics Letters"
DOI: 10.1063/5.0305250
Abstract: Zirconium doped AlN (AlN:Zr) epilayers hold significant promise for advanced electronic and quantum applications, including photoconductive semiconductor switches for high-voltage and high-power operations as well as quantum qubit and sensing technologies. Despite its potential, producing… read more here.
Keywords: aln epilayers; transition; doped aln; transition layer ... See more keywords