Morphology and element composition profiles of alumina films obtained by mixed thermal oxidation of AlN epitaxial layers
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DOI: 10.1016/j.apsusc.2019.03.319
Abstract: Abstract The mixed thermal oxidation of the high temperature aluminium nitride (HT-AlN) epitaxial layer leads to the formation of the stable aluminium oxide having a developed surface area, potentially suitable for sensor applications. In this… read more here.
Keywords: mixed thermal; surface; oxidation; spectroscopy ... See more keywords