Quasi-van der Waals Epitaxy of a Stress-Released AlN Film on Thermally Annealed Hexagonal BN for Deep Ultraviolet Light-Emitting Diodes.
Sign Up to like & getrecommendations! Published in 2023 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.3c03438
Abstract: The heteroepitaxy of high-quality aluminum nitride (AlN) with low stress is essential for the development of energy-efficient deep ultraviolet light-emitting diodes (DUV-LEDs). In this work, we realize that quasi-van der Waals epitaxy growth of a… read more here.
Keywords: stress; aln; aln film; deep ultraviolet ... See more keywords
Development of a flux-film-coated sputtering (FFC-sputtering) method for fabricating c-axis oriented AlN film
Sign Up to like & getrecommendations! Published in 2020 at "AIP Advances"
DOI: 10.1063/5.0025736
Abstract: In this study, we developed a novel growth method named “Flux-Film-Coated (FFC) sputtering.” In this method, nitrogen radicals were supplied to the Al–Sn flux at around 600 °C followed by the deposition of an Al–Sn metal… read more here.
Keywords: flux; sputtering method; method; film ... See more keywords
Preparation of AlN film grown on sputter-deposited and annealed AlN buffer layer via HVPE
Sign Up to like & getrecommendations! Published in 2021 at "Chinese Physics B"
DOI: 10.1088/1674-1056/abd392
Abstract: AlN films grown on sputter-deposited and annealed AlN buffer layer by high temperature hydride vapor phase epitaxy (HVPE) have been fabricated and structurally characterized. The crystalline quality and surface morphology of as-grown AlN films with… read more here.
Keywords: aln film; aln; aln films; layer ... See more keywords
Growth of Semi-Polar (101¯3) AlN Film on M-Plane Sapphire with High-Temperature Nitridation by HVPE
Sign Up to like & getrecommendations! Published in 2021 at "Materials"
DOI: 10.3390/ma14071722
Abstract: Aluminum nitride (AlN) films were grown on the m-plane sapphire by high-temperature hydride vapor phase epitaxy (HVPE). The effect of high-temperature nitridation on the quality of AlN film was studied. The high-temperature nitridation is favorable… read more here.
Keywords: nitridation; high temperature; temperature; aln film ... See more keywords
Exfoliation of AlN film using two-dimensional multilayer hexagonal BN for deep-ultraviolet light-emitting diodes
Sign Up to like & getrecommendations! Published in 2018 at "Applied Physics Express"
DOI: 10.7567/1882-0786/aaeede
Abstract: Crack-free crystalline AlN film was synthesized on two-dimensional multilayer hexagonal BN (h-BN) by metal organic vapor phase epitaxy (MOVPE). The multilayer h-BN was directly grown on sapphire substrates in wafer scale by MOVPE, with a… read more here.
Keywords: multilayer hexagonal; two dimensional; dimensional multilayer; aln ... See more keywords