The origin and mitigation of volcano-like morphologies in micron-thick AlGaN/AlN heteroepitaxy
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DOI: 10.1063/1.4999767
Abstract: We investigated the origin of morphological instability in 2 μm thick Al0.6Ga0.4N/AlN heteroepitaxy. The primary morphology was driven by the residual epitaxial strain, forming hill-like morphologies via surface diffusion. The secondary morphology was driven by the… read more here.
Keywords: volcano like; aln heteroepitaxy; like morphologies; origin mitigation ... See more keywords