Phonon frequencies of a highly strained AlN layer coherently grown on 6H-SiC (0001)
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DOI: 10.1063/1.4974500
Abstract: Phonon frequencies of a high-quality AlN layer coherently grown on a 6H-SiC (0001) substrate are investigated by Raman scattering. Owing to the largest strain in our coherent AlN layer among heteroepitaxially grown AlN layers ever… read more here.
Keywords: aln layer; layer coherently; phonon frequencies; quality ... See more keywords
Crack-free > 1-μm AlN layer on Si substrate using ductile interlayer for strain modification in epitaxial film
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DOI: 10.1063/5.0219833
Abstract: Growing crack-free, epitaxial ultrawide-bandgap semiconductor films on cost-effective, large-area substrates, such as AlN on Si, poses a significant challenge due to substantial lattice and thermal expansion mismatches. We introduce an approach to mitigate tensile strain… read more here.
Keywords: free aln; aln layer; strain; aln ... See more keywords
Microstructure and Properties of TiSiN/AlN with Different Modulation Periods
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DOI: 10.1155/2019/6340159
Abstract: TiSiN/AlN nanomultilayers with different thicknesses of AlN layer were deposited on 304 stainless steel by magnetron sputtering system. X-ray diffraction, nanoindentation tester, atomic force microscopy, and friction wear tester were used to characterize microstructure and… read more here.
Keywords: aln layer; properties tisin; aln; tisin aln ... See more keywords