Investigation on Quasi Lamb Wave Modes in AlN-on-Si MEMS Resonators.
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DOI: 10.1109/tuffc.2023.3257327
Abstract: Aluminum nitride (AlN)-on-Si MEMS resonators operating in Lamb wave modes have found wide applications for physical sensing and frequency generation. Due to the inherent layered structure, the strain distributions of Lamb wave modes become distorted… read more here.
Keywords: mems resonators; aln mems; lamb wave; mode ... See more keywords