AlN-to-Metal Direct Bonding Process Utilizing Sintering of Ag Nanoparticles Derived from the Reduction of Ag2O
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DOI: 10.1007/s11664-018-6504-2
Abstract: Bonding between AlN and metals conventionally requires a surface modification process at high temperature such as metallization. The AlN-to-metal direct bonding process by sintering of Ag nanoparticles derived from in situ reduction of Ag2O microparticles… read more here.
Keywords: aln metal; direct bonding; process; bonding process ... See more keywords