Epitaxial growth of AlN microwalls on wet etched GaN template by MOCVD
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DOI: 10.1016/j.spmi.2018.07.011
Abstract: Abstract This paper reports on the unique approach adopted for the growth of vertically aligned two-dimensional AlN microwall arrays by a catalyst-free metal organic chemical vapor deposition (MOCVD) system via a two-step growth method. Wall-like… read more here.
Keywords: aln microwalls; template; growth aln; growth ... See more keywords