Adjustment of Al atom migration ability and its effect on the surface morphology of AlN grown on sapphire by metal–organic chemical vapor deposition
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DOI: 10.1088/1361-6641/ac19ec
Abstract: Low-temperature AlN templates were grown directly on a sapphire c-plane (001) by a two-step growth method. The different AlN morphologies were observed, and the influence of the ammonia and trimethylaluminum flowrate on the AlN morphology… read more here.
Keywords: adjustment atom; aln morphology; atom migration; surface ... See more keywords