Tuning the piezoelectric and mechanical properties of the AlN system via alloying with YN and BN
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DOI: 10.1063/1.4993254
Abstract: Recent advances in microelectromechanical systems often require multifunctional materials, which are designed so as to optimize more than one property. Using density functional theory calculations for alloyed nitride systems, we illustrate how co-alloying a piezoelectric… read more here.
Keywords: piezoelectric mechanical; aln system; tuning piezoelectric; system via ... See more keywords