Stand-alone differential capacitance force sensors with sub-nano-newton sensitivity
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DOI: 10.1088/1361-6439/aa81bc
Abstract: National Natural Science Foundation of China [51675304, 11572173]; Beijing Science and Technology Program [Z151100003315008]; National Program on Key Basic Research Project [2013CB934200]; Cyrus Tang Foundation read more here.
Keywords: force sensors; alone differential; differential capacitance; capacitance force ... See more keywords