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Published in 2018 at "Materials Science in Semiconductor Processing"
DOI: 10.1016/j.mssp.2018.08.007
Abstract: Abstract To develop Aluminum Antimonide (AlSb) -based optoelectronic devices on Si substrates, AlSb films were investigated for a good crystalline quality and suitable optical and electrical properties. Under an optimized growth condition by RF-magnetron sputtering…
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Keywords:
optoelectronic devices;
alsb based;
alsb films;
based optoelectronic ... See more keywords