Structural, optical, electrical and deliquescent properties of AlSb:Cu thin films prepared by magnetron sputtering
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DOI: 10.1016/j.vacuum.2020.109341
Abstract: Abstract The films with AlSb/Cu/AlSb/Cu/AlSb/Cu structure were deposited on glass substrate using copper target and aluminum-antimony alloying target by magnetron sputtering technology, and then annealed at different temperatures to obtain Cu-doped AlSb thin films. The… read more here.
Keywords: magnetron sputtering; thin films; alsb; alsb thin ... See more keywords