Sub-micrometer pyroelectric tomography of AlScN films
Sign Up to like & getrecommendations! Published in 2021 at "Applied Physics Letters"
DOI: 10.1063/5.0047002
Abstract: We report on one- to three-dimensional characterization of the pyroelectric properties of aluminum scandium nitride. By means of the laser intensity modulation method, we reconstructed the in-depth distribution of the spontaneous polarization with sub-micrometer resolution.… read more here.
Keywords: pyroelectric tomography; micrometer pyroelectric; tomography alscn; sub micrometer ... See more keywords
High Rate Deposition of Piezoelectric AlScN Films by Reactive Magnetron Sputtering from AlSc Alloy Targets on Large Area
Sign Up to like & getrecommendations! Published in 2022 at "Micromachines"
DOI: 10.3390/mi13101561
Abstract: This paper reports on the deposition and characterization of piezoelectric AlXSc1-XN (further: AlScN) films on Si substrates using AlSc alloy targets with 30 at.% Sc. Films were deposited on a Ø200 mm area with deposition… read more here.
Keywords: pulse mode; area; deposition; alscn films ... See more keywords