AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application
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DOI: 10.3390/mi13091550
Abstract: This paper presents AlScN piezoelectric two-axis MEMS mirrors with gimbal-less and gimbaled designs fabricated in a CMOS-compatible manner. Integrated piezoelectric sensors provided feedback signals of the actual mirror positions. The mirror with a diameter of… read more here.
Keywords: alscn piezoelectric; mirror; field view; mems mirrors ... See more keywords