Temperature Performance Study of SAW Sensors Based on AlN and AlScN
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DOI: 10.3390/mi14051065
Abstract: In this paper, the temperature performance of AlN-SAW resonators and AlScN-SAW resonators is studied. They are simulated by COMSOL Multiphysics, and their modes and the S11 curve are analyzed. The two devices were fabricated using… read more here.
Keywords: alscn saw; saw resonator; temperature performance; temperature ... See more keywords