Spin-coating for fabrication of high-entropy high-k (AlTiVZrHf)O films on Si for advanced gate stacks
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DOI: 10.1016/j.ceramint.2021.04.267
Abstract: Abstract Spin-coating was performed to fabricate amorphous high-entropy oxide (HEO) (AlTiVZrHf)Ox films on Si substrates. The films were evaluated through X-ray photoelectron spectroscopy and through transmission electron microscopy (TEM)-based energy-dispersive spectroscopy (EDS) mapping, which respectively… read more here.
Keywords: spin coating; spectroscopy; advanced gate; altivzrhf ... See more keywords