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Published in 2020 at "Journal of Vacuum Science and Technology"
DOI: 10.1116/1.5134055
Abstract: Molecular layer deposition (MLD) is a thin film technique to make a pure organic coating or hybrid organic–inorganic film, sequentially dosing organic–organic or organic–inorganic precursors, respectively. In this study, hybrid organic–inorganic alucone films were fabricated…
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Keywords:
alucone films;
carbon;
organic inorganic;
alucone ... See more keywords