Thermal Conductivity of Aluminum Scandium Nitride for 5G Mobile Applications and Beyond.
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DOI: 10.1021/acsami.1c02912
Abstract: Radio frequency (RF) microelectromechanical systems (MEMS) based on Al1-xScxN are replacing AlN-based devices because of their higher achievable bandwidths, suitable for the fifth-generation (5G) mobile network. However, overheating of Al1-xScxN film bulk acoustic resonators (FBARs)… read more here.
Keywords: conductivity aluminum; aluminum scandium; thermal conductivity; conductivity ... See more keywords