Amorphous AlN films grown by ALD from trimethylaluminum and monomethylhydrazine.
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DOI: 10.1039/d1dt02529e
Abstract: The great interest in aluminium nitride thin films has been attributed to their excellent dielectric, thermal and mechanical properties. Here we present the results of amorphous AlN films obtained by atomic layer deposition. We used… read more here.
Keywords: trimethylaluminum monomethylhydrazine; amorphous aln; aln films; mechanical properties ... See more keywords
Cutoff frequency increase of gate recessed AlGaN/GaN MISHFETs with amorphous AlN insulator
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DOI: 10.1063/5.0252024
Abstract: The RF performance of gate recessed MISHFET devices with an amorphous AlN layer was investigated by small-signal (S-parameter) measurements. They reveal current gain and unilateral power gain cutoff frequencies of 125 and 138 GHz, respectively. These… read more here.
Keywords: gate recessed; amorphous aln; algan gan; gate ... See more keywords