Electrical and chemical analysis of Ti/Au contacts to β-Ga2O3
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DOI: 10.1063/5.0051340
Abstract: Chemical and electrical measurements of Ti/(010) β-Ga2O3 and Ti/(001) β-Ga2O3 interfaces were conducted as a function of annealing temperature using x-ray photoelectron spectroscopy (XPS), current density–voltage (J–V), and capacitance–voltage (C–V) measurements. XPS revealed partial Ti… read more here.
Keywords: 001 ga2o3; ga2o3; analysis contacts; electrical chemical ... See more keywords