Static and Eigenvalue Analysis of Electrostatically Coupled and Tunable Shallow Micro-Arches for Sensing-Based Applications
Sign Up to like & getrecommendations! Published in 2023 at "Micromachines"
DOI: 10.3390/mi14050903
Abstract: This paper investigated the mechanical performance of an electrostatically tunable microbeams-based resonators. The resonator was designed based on two initially-curved microbeams that are electrostatically coupled, offering the potential for improved performance compared to single-beam based… read more here.
Keywords: static eigenvalue; electrostatically coupled; eigenvalue analysis; micro ... See more keywords