Method for calculation and analysis of the weights of grating mosaic errors.
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DOI: 10.1364/ao.58.004939
Abstract: A method to calculate the weight of grating mosaic errors is proposed based on an analytical hierarchy process. An accurate mosaic error tolerance calculation formula is also presented that is useful for large-size grating fabrication… read more here.
Keywords: method calculation; grating mosaic; mosaic errors; analysis weights ... See more keywords