All-Silicon Single-Layer Terahertz Grating for Angular and Linear Displacement Sensing
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DOI: 10.1109/tcpmt.2025.3613679
Abstract: In this article, an all-silicon single-layer terahertz (THz) grating combined with both static and deformable structures is proposed and experimentally demonstrated for simultaneously angular and linear displacement sensing. The experimental results illustrate an outstanding sensitivity… read more here.
Keywords: single layer; silicon single; angular linear; linear displacement ... See more keywords