Anisotropic etching of silicon in KOH + Triton X-100 for 45° micromirror applications
Sign Up to like & getrecommendations! Published in 2017 at "Microsystem Technologies"
DOI: 10.1007/s00542-016-3103-0
Abstract: The etching process of monocrystalline silicon in potassium hydroxide solution with addition of Triton X-100 surfactant at different temperatures is studied. It is shown that decreasing the temperature lowers etch rates and improves surface morphology… read more here.
Keywords: triton 100; koh triton; anisotropic etching; silicon ... See more keywords
Scanning probe-based nanolithography: nondestructive structures fabricated on silicon surface via distinctive anisotropic etching in HF/HNO3 mixtures
Sign Up to like & getrecommendations! Published in 2020 at "Journal of Materials Science"
DOI: 10.1007/s10853-020-05452-2
Abstract: HF/HNO3 mixtures were typical isotropic etching systems for processing silicon (Si) surface, and still suffer from difficulties in controllably fabricating nanostructures. Here, fast and anisotropic etching approach with HF/HNO3 mixtures was developed to overcome this… read more here.
Keywords: anisotropic etching; distinctive anisotropic; silicon surface; hno3 mixtures ... See more keywords
Influence of copper foil polycrystalline structure on graphene anisotropic etching
Sign Up to like & getrecommendations! Published in 2017 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2016.10.018
Abstract: Abstract Anisotropic etching of graphene and other two dimensional materials is an important tool to understand the growth process as well as enabling fabrication of various well-defined structures. Here, we reveal the influence of copper… read more here.
Keywords: foil; graphene; anisotropic etching; influence copper ... See more keywords
Anisotropic Etching of Hexagonal Boron Nitride and Graphene: Question of Edge Terminations.
Sign Up to like & getrecommendations! Published in 2017 at "Nano letters"
DOI: 10.1021/acs.nanolett.7b02841
Abstract: Chemical vapor deposition (CVD) has been established as the most effective way to grow large area two-dimensional materials. Direct study of the etching process can reveal subtleties of this competing with the growth reaction and… read more here.
Keywords: etching hexagonal; boron nitride; hexagonal boron; anisotropic etching ... See more keywords
Anisotropic Etching of InGaN Thin Films with Photoelectrochemical Etching to Form Quantum Dots
Sign Up to like & getrecommendations! Published in 2023 at "Materials"
DOI: 10.3390/ma16051890
Abstract: Traditional methods for synthesizing InGaN quantum dots (QDs), such as the Stranski-Krastanov growth, often result in QD ensembles with low density and non-uniform size distribution. To overcome these challenges, forming QDs using photoelectrochemical (PEC) etching… read more here.
Keywords: anisotropic etching; quantum dots; thin films; etching ingan ... See more keywords