Anisotropic pyrochemical dry etching of fluorinated ethylene propylene induced by pre-irradiation with synchrotron radiation
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DOI: 10.1063/6.0000702
Abstract: Anisotropic pyrochemical micro-etching induced by synchrotron x-ray irradiation is developed as a microfabrication process for fluorinated ethylene propylene (FEP). X-ray irradiation is performed at room temperature, and the irradiation area is etched by heating in… read more here.
Keywords: ethylene propylene; fluorinated ethylene; irradiation; synchrotron ... See more keywords