Strain mapping in amorphous germanium thin films with scanning reflectance anisotropy microscopy
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DOI: 10.1063/5.0218645
Abstract: Strain imaging is a critical aspect in the design and characterization of opto-electronics, microelectronics, flexible electronics, and on-chip photonics. However, strain mapping techniques are often material specific and strain measurements in amorphous materials remain a… read more here.
Keywords: reflectance anisotropy; anisotropy microscopy; scanning reflectance; strain mapping ... See more keywords